Online beam current estimation in particle beam microscopy
dc.contributor.author | Seidel, Sheila W. | en_US |
dc.contributor.author | Watkins, Luisa | en_US |
dc.contributor.author | Peng, Minxu | en_US |
dc.contributor.author | Agarwal, Akshay | en_US |
dc.contributor.author | Yu, Christopher | en_US |
dc.contributor.author | Goyal, Vivek K. | en_US |
dc.date.accessioned | 2023-03-20T19:34:07Z | |
dc.date.available | 2023-03-20T19:34:07Z | |
dc.date.issued | 2022 | |
dc.identifier | https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000838399800001&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=6e74115fe3da270499c3d65c9b17d654 | |
dc.identifier.citation | S.W. Seidel, L. Watkins, M. Peng, A. Agarwal, C. Yu, V.K. Goyal. 2022. "Online Beam Current Estimation in Particle Beam Microscopy" IEEE transactions on computational imaging, Volume 8, pp.521-535. https://doi.org/10.1109/tci.2022.3182212 | |
dc.identifier.issn | 2573-0436 | |
dc.identifier.issn | 2333-9403 | |
dc.identifier.uri | https://hdl.handle.net/2144/45766 | |
dc.format.extent | p. 521-535 | en_US |
dc.language.iso | en_US | |
dc.publisher | Institute of Electrical and Electronics Engineers (IEEE) | en_US |
dc.relation.ispartof | IEEE transactions on computational imaging | |
dc.subject | Electron microscopy | en_US |
dc.subject | Estimation theory | en_US |
dc.subject | Fisher information | en_US |
dc.subject | Gallium ion beam | en_US |
dc.subject | Helium ion beam | en_US |
dc.subject | Neon ion beam | en_US |
dc.subject | Neyman type A distribution | en_US |
dc.subject | Poisson processes | en_US |
dc.subject | Touchard polynomials | en_US |
dc.title | Online beam current estimation in particle beam microscopy | en_US |
dc.type | Article | en_US |
dc.date.updated | 2023-01-11T16:49:03Z | |
dc.description.version | Accepted manuscript | en_US |
dc.identifier.doi | 10.1109/tci.2022.3182212 | |
pubs.author-url | https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000838399800001&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=6e74115fe3da270499c3d65c9b17d654 | |
pubs.publication-status | Published | en_US |
dc.identifier.orcid | 0000-0002-1239-3003 (Seidel, Sheila W) | |
dc.identifier.orcid | 0000-0002-3452-7455 (Watkins, Luisa) | |
dc.identifier.orcid | 0000-0003-1041-8278 (Peng, Minxu) | |
dc.identifier.orcid | 0000-0002-5944-3346 (Agarwal, Akshay) | |
dc.identifier.orcid | 0000-0001-8471-7049 (Goyal, Vivek K) | |
dc.identifier.mycv | 761275 |
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