Online beam current estimation in particle beam microscopy

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Date Issued
2022
Publisher Version
10.1109/tci.2022.3182212
Author(s)
Seidel, Sheila W.
Watkins, Luisa
Peng, Minxu
Agarwal, Akshay
Yu, Christopher
Goyal, Vivek K.
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Permanent Link
https://hdl.handle.net/2144/45766
Version
Accepted manuscript
Citation (published version)
S.W. Seidel, L. Watkins, M. Peng, A. Agarwal, C. Yu, V.K. Goyal. 2022. "Online Beam Current Estimation in Particle Beam Microscopy" IEEE transactions on computational imaging, Volume 8, pp.521-535. https://doi.org/10.1109/tci.2022.3182212
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